Registro completo de metadatos
| Campo DC | Valor | Lengua/Idioma |
|---|---|---|
| dc.provenance | CONICET | - |
| dc.creator | Imboden, Matthias | - |
| dc.creator | Han, Han | - |
| dc.creator | Stark, Thomas | - |
| dc.creator | Lowell, Evan | - |
| dc.creator | Chang, Jackson | - |
| dc.creator | Pardo, Flavio | - |
| dc.creator | Bolle, Cristian | - |
| dc.creator | del Corro, Pablo Guillermo | - |
| dc.creator | Bishop, David J. | - |
| dc.date | 2018-01-22T22:25:34Z | - |
| dc.date | 2018-01-22T22:25:34Z | - |
| dc.date | 2014-04 | - |
| dc.date | 2018-01-05T16:26:01Z | - |
| dc.date.accessioned | 2019-04-29T15:37:00Z | - |
| dc.date.available | 2019-04-29T15:37:00Z | - |
| dc.date.issued | 2014-04 | - |
| dc.identifier | Imboden, Matthias ; Han, Han; Stark, Thomas; Lowell, Evan; Chang, Jackson; et al.; Building a Fab on a Chip; Royal Society of Chemistry; Nanoscale; 6; 10; 4-2014; 5049-5062 | - |
| dc.identifier | 2040-3364 | - |
| dc.identifier | http://hdl.handle.net/11336/34219 | - |
| dc.identifier | CONICET Digital | - |
| dc.identifier | CONICET | - |
| dc.identifier.uri | http://rodna.bn.gov.ar:8080/jspui/handle/bnmm/297800 | - |
| dc.description | Semiconductor fabs are large, complex industrial sites with costs for a single facility approaching $10B. In this paper we discuss the possibility of putting the entire functionality of such a fab onto a single silicon chip. We demonstrate a path forward where, for certain applications, especially at the nanometer scale, one can consider using a single chip approach for building devices with significant potential cost savings. In our approach, we build micro versions of the macro machines one typically finds in a fab, and integrating all the components together. We argue that the technology now exists to allow one to build a Fab on a Chip. | - |
| dc.description | Fil: Imboden, Matthias. Boston University; Estados Unidos | - |
| dc.description | Fil: Han, Han. Boston University; Estados Unidos | - |
| dc.description | Fil: Stark, Thomas. Boston University; Estados Unidos | - |
| dc.description | Fil: Lowell, Evan. Boston University; Estados Unidos | - |
| dc.description | Fil: Chang, Jackson. Boston University; Estados Unidos | - |
| dc.description | Fil: Pardo, Flavio. Bell Labs; Estados Unidos | - |
| dc.description | Fil: Bolle, Cristian. Bell Labs; Estados Unidos | - |
| dc.description | Fil: del Corro, Pablo Guillermo. Comisión Nacional de Energía Atómica. Centro Atómico Bariloche; Argentina. Consejo Nacional de Investigaciones Científicas y Técnicas; Argentina | - |
| dc.description | Fil: Bishop, David J.. Boston University; Estados Unidos | - |
| dc.format | application/pdf | - |
| dc.format | application/pdf | - |
| dc.language | eng | - |
| dc.publisher | Royal Society of Chemistry | - |
| dc.relation | info:eu-repo/semantics/altIdentifier/doi/http://dx.doi.org/10.1039/C3NR06087J | - |
| dc.relation | info:eu-repo/semantics/altIdentifier/url/http://pubs.rsc.org/en/Content/ArticleLanding/2014/NR/C3NR06087J | - |
| dc.rights | info:eu-repo/semantics/restrictedAccess | - |
| dc.rights | https://creativecommons.org/licenses/by-nc-sa/2.5/ar/ | - |
| dc.source | reponame:CONICET Digital (CONICET) | - |
| dc.source | instname:Consejo Nacional de Investigaciones Científicas y Técnicas | - |
| dc.source | instacron:CONICET | - |
| dc.source.uri | http://hdl.handle.net/11336/34219 | - |
| dc.subject | MEMS | - |
| dc.subject | FOC | - |
| dc.subject | Nano-materiales | - |
| dc.subject | Nanotecnología | - |
| dc.subject | INGENIERÍAS Y TECNOLOGÍAS | - |
| dc.title | Building a Fab on a Chip | - |
| dc.type | info:eu-repo/semantics/article | - |
| dc.type | info:eu-repo/semantics/publishedVersion | - |
| dc.type | info:ar-repo/semantics/articulo | - |
| Aparece en las colecciones: | CONICET | |
Ficheros en este ítem:
No hay ficheros asociados a este ítem.